Kristina Bespalova
Project Specialist
Project Specialist
T410 Dept. Electrical Engineering and Automation
Full researcher profile
Phone number
+358504127838
Areas of expertise
Honors and awards
JVST A Best ALD Paper Award
Award for paper "Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls, by Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen and Mervi Paulasto-Kröckel, JVST A 39, 032403 (2021)"
Palkinto tai huomionosoitus tuotoksesta
Kemian ja materiaalitieteen laitos
Jun 2021
Research groups
- Electronics Integration and Reliability, Projektityöntekijä
Publications
Kristina Bespalova
2024
Kristina Bespalova, Glenn Ross, Sami Suihkonen, Mervi Paulasto-Kröckel
2024
Advanced Electronic Materials
Kristina Bespalova, Tarmo Nieminen, Artem Gabrelian, Glenn Ross, Mervi Paulasto-Kröckel
2023
Advanced Electronic Materials
Gabrelian Gabrelian, Glenn Ross, Kristina Bespalova, Mervi Paulasto-Kröckel
2022
Materials Today Communications
Prokhor A. Alekseev, Bogdan R. Borodin, Pavel Geydt, Vladislav Khayrudinov, Kristina Bespalova, Demid A. Kirilenko, Rodion R. Reznik, Alexey Nashchekin, Tuomas Haggren, Erkki Lahderanta, George E. Cirlin, Harri Lipsanen, Mikhail S. Dunaevskiy
2021
Nanotechnology
Kristina Bespalova, Elmeri österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala
2021
Journal of Microelectromechanical Systems
Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen, Mervi Paulasto-Kröckel
2021
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kristina Bespalova, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Sebastian Thanniyil, Cyril Karuthedath, Stefan Mertin, Tuomas Pensala
2020
Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020